Multirate PWM Control of Precision Stage for Ultrahigh-Speed Nanoscale Positioning

Motion control techniques are employed for nanoscale positioning in industrial equipment such as numerical control (NC) machine tools and exposure systems. The advanced motion control techniques are based on precise current control. However, speeding up the precise current response causes a serious limitation owing to the carrier period of the inverter. In addition, the position response has to be slower than the current response. In a previous paper, we designed and fabricated an experimental precision stage, achieving novel ultrahigh-speed nanoscale positioning based on multirate pulse width modulation (PWM) control. However, it was difficult to achieve faster and more precise positioning because of the resonance modes of the stage. In this paper, we propose a multirate PWM control in which the resonance mode is considered. Simulations and experiments are performed to demonstrate the advantages of the proposed method.

[1]  H. Fujimoto,et al.  Multirate Perfect Tracking Control of Single-phase Inverter with Inter Sampling for Arbitrary Waveform , 2007, 2007 Power Conversion Conference - Nagoya.

[2]  Asif Sabanoviç,et al.  Sliding-Mode Control for High-Precision Motion of a Piezostage , 2007, IEEE Transactions on Industrial Electronics.

[3]  Fang Lin Luo,et al.  Robust and precision motion control system of linear-motor direct drive for high-speed X-Y table positioning mechanism , 2005, IEEE Transactions on Industrial Electronics.

[4]  Atsuo Kawamura,et al.  Perfect tracking control based on multirate feedforward control with generalized sampling periods , 2001, IEEE Trans. Ind. Electron..

[5]  Henk Nijmeijer,et al.  Performance-Improved Design of N-PID Controlled Motion Systems With Applications to Wafer Stages , 2009, IEEE Transactions on Industrial Electronics.

[6]  Okko H. Bosgra,et al.  Multivariable feedback control design for high-precision wafer stage motion , 2002 .

[7]  Hiroshi Fujimoto,et al.  Positioning of Large-Scale High-Precision Stage with Vibration Suppression PTC , 2008 .

[8]  Han Ding,et al.  Point-to-Point Motion Control for a High-Acceleration Positioning Table via Cascaded Learning Schemes , 2007, IEEE Transactions on Industrial Electronics.

[9]  H. Fujimoto,et al.  Multirate adaptive robust control for discrete-time non-minimum phase systems and application to linear motors , 2005, IEEE/ASME Transactions on Mechatronics.

[10]  T. Yokoyama,et al.  Instantaneous deadbeat control for PWM inverter using FPGA based hardware controller , 2003, IECON'03. 29th Annual Conference of the IEEE Industrial Electronics Society (IEEE Cat. No.03CH37468).

[11]  Okko Bosgra,et al.  Fixed Structure Feedforward Controller Design Exploiting Iterative Trials: Application to a Wafer Stage and a Desktop Printer , 2008 .

[12]  H. Fujimoto,et al.  Perfect Tracking Control of Servo Motor Based on Precise Model with PWM Hold and Current Loop , 2007, 2007 Power Conversion Conference - Nagoya.

[13]  Raymond A. de Callafon,et al.  Multivariable feedback relevant system identification of a wafer stepper system , 2001, IEEE Trans. Control. Syst. Technol..

[14]  Hsin-Jang Shieh,et al.  An Adaptive Approximator-Based Backstepping Control Approach for Piezoactuator-Driven Stages , 2008, IEEE Transactions on Industrial Electronics.

[15]  Tong Heng Lee,et al.  Improving Transient Performance in Tracking General References Using Composite Nonlinear Feedback Control and Its Application to High-Speed $XY$-Table Positioning Mechanism , 2007, IEEE Transactions on Industrial Electronics.

[16]  Atsuo Kawamura,et al.  Dead beat microprocessor control of PWM inverter for sinusoidal output waveform synthesis , 1985, 1985 IEEE Power Electronics Specialists Conference.