A novel MEMS-based piezoelectric multi-modal vibration energy harvester concept to power autonomous remote sensing nodes for Internet of Things (IoT) applications

The Internet of Things (IoT) urges for development and pervasive deployment of energy-autonomous integrated remote sensing nodes. Microsystems-based (i.e. MEMS) Energy Harvesting (EH) seems to be a key-enabling technology to face such a challenge, and environmental vibrations are a source of energy commonly available in domestic, industrial and public contexts. A major limitation of standard vibration Energy Harvesters (EHs) is the power conversion performance typically pronounced just around the fundamental mechanical resonant frequency (narrowband device). In this work, we introduce a resonator design concept named Four-Leaf Clover (FLC). Having several mechanical Degrees Of Freedom (DOFs), the FLC EH-MEMS exhibits several resonant modes in the frequency range from around 200 Hz up to several kHz. Thereafter, it IS capable to convert mechanical into electric energy efficiently in a wide frequency range of vibrations (wideband device). The FLC EH-MEMS design concept discussion is corroborated by simulations and experimental measurements that verify its performance and, in turn, that provide support to the contribution it can bring to self-powered integrated sensing nodes in the IoT scenario.

[1]  Jan M. Rabaey,et al.  Energy scavenging for wireless sensor networks , 2003 .

[2]  Jean-Philippe Vasseur,et al.  Interconnecting Smart Objects with IP: The Next Internet , 2010 .

[3]  Julien Penders,et al.  Energy Harvesting for Autonomous Wireless Sensor Networks , 2010, IEEE Solid-State Circuits Magazine.

[4]  P. Ancey,et al.  3D Multi-Frequency MEMS Electromechanical Resonator Design , 2009, EuroSimE 2009 - 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems.

[5]  Alan R. Wood,et al.  A two-mass cantilever beam model for vibration energy harvesting applications , 2010, 2010 IEEE International Conference on Automation Science and Engineering.

[6]  Pasqualina M. Sarro,et al.  Multi-modal vibration based MEMS energy harvesters for ultra-low power wireless functional nodes , 2014 .

[7]  Einar Halvorsen.  Erratum: Fundamental issues in nonlinear wideband-vibration energy harvesting [Phys. Rev. E 87, 042129 (2013)] , 2013 .

[8]  D. Peroulis,et al.  Increased-bandwidth, meandering vibration energy harvester , 2011, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference.

[9]  Daniel J. Inman,et al.  Modeling of Piezoelectric Energy Harvesting from an L-shaped Beam-mass Structure with an Application to UAVs , 2009 .

[10]  Ulrich Schmid,et al.  Experimental verification of a novel MEMS multi-modal vibration energy harvester for ultra-low power remote sensing nodes , 2015, Microtechnologies for the New Millennium.

[11]  A. Hajati,et al.  Design and fabrication of a nonlinear resonator for ultra wide-bandwidth energy harvesting applications , 2011, 2011 IEEE 24th International Conference on Micro Electro Mechanical Systems.

[12]  Neil M. White,et al.  Energy Harvesting for Autonomous Systems , 2010 .

[13]  Siarhei Dziarzhytski,et al.  Photolysis of water-radical ions H2O+ in the xuv: Fragmentation through dicationic states , 2013 .

[14]  Florian Michahelles,et al.  Architecting the Internet of Things , 2011 .

[15]  Jan R. Wright,et al.  Design of a multiresonant beam for broadband piezoelectric energy harvesting , 2010 .

[16]  Hyung-Jo Jung,et al.  Broadband energy-harvesting using a two degree-of-freedom vibrating body , 2011 .