Fiber optic photoluminescence setup for spatially resolved measurements

Spatially resolved photoluminescence is used as a nondestructive tool to characterize semiconductor epitaxial wafers with a resolution better than the device dimensions. In this paper, we describe a novel photoluminescence measurement setup using fiber optic techniques for luminescence excitation and detection in a very simple confocal arrangement. A final spatial resolution as small as 5 /spl mu/m/spl plusmn/0.5 /spl mu/m together with the compact design makes it very attractive.

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