Suppression of competitive pressure modes in a redundant actuators for a vibration-isolation table

This paper develops a suppression method for an instable states arising in a redundant pneumatic actuators supporting a vibration-isolation table. The instable states are based on inadequate (ill-posed) distribution of forces on the redundant numbers of actuators with respect to the degrees of freedom of table's motion, and are named Competitive Pressure Modes (CPM). This study proposes an optimal load distribution method for stabilizing and suppressing the Competitive Pressure Modes arising in the vibration-isolation table. This study investigates the validity and the effectiveness of proposed method.