论文信息 - Data Acquisition, Analysis and Simulation of Micro–Indentations

Data Acquisition, Analysis and Simulation of Micro–Indentations

In response to continuing needs to characterize surfaces and near surface volumes in the microelectronics and surface coatings industries, CSIRO Australia has developed an ultra–micro indentation system which is computerized and highly flexible. Data from the instrument is readily analyzed and modeled using well established and newly developed contact mechanics theory. The UMIS–2000 is briefly described and some results obtained from the numerous applications are presented.

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