MEMS : Introduction and Fundamentals

Introduction Mohamed Gad-el-Hak Scaling of Micromechanical Devices William Trimmer and Robert H. Stroud Mechanical Properties of MEMS Materials William N. Sharpe, Jr. Flow Physics Mohamed Gad-el-Hak Integrated Simulation for MEMS: Coupling Flow-Structure-Thermal-Electrical Domains Robert M. Kirby, George Em Karniadakis, Oleg Mikulchenko, and Kartikeya Mayaram Molecular-Based Microfluidic Simulation Models Ali Beskok Hydrodynamics of Small-Scale Internal Gaseous Flows Nicolas G. Hadjiconstantinou Burnett Simulations of Flows in Microdevices Ramesh K. Agarwal and Keon-Young Yun Lattice Boltzmann Simulations of Slip Flows in Microchannels Ramesh K. Agarwal Liquid Flow in Microchannels Kendra V. Sharp, Ronald J. Adrian, Juan G. Santiago, and Joshua I. Molho Lubrication in MEMS Kenneth Breuer Physics of Thin Liquid Films Alexander Oron Bubble/Drop Transport in Microchannels Hsueh-Chia Chang Fundamentals of Control Theory J. William Goodwine Model-Based Flow Control for Distributed Architectures Thomas R. Bewley Soft Computing in Control Mihir Sen and Bill Goodwine Index