论文信息 - Optical power induced damage to microelectromechanical mirrors

Optical power induced damage to microelectromechanical mirrors

This paper presents the results of an investigation of optical power induced damage to surface-micromachined micromirrors. A mathematical model was developed and used to predict the minimum incident optical power that will permanently damage the reflective surface of a micromirror. The model is based on a heat flow analysis of a microelectromechanical systems (MEMS) device in thermal equilibrium under continuous direct illumination, and has been validated using a variety of micromirror designs with both thermal simulation and direct laser illumination.

David M. Burns | Victor M. Bright | V. Bright | D. Burns

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