论文信息 - Advantages of Angled Sidewalls in Slot Waveguides

Advantages of Angled Sidewalls in Slot Waveguides

Advantages of angled sidewalls in slot waveguides are discussed. Enhanced vertical optical confinement in such waveguides is shown. Filling of an angled-sidewall slot structure with conformal growth by atomic layer deposition is discussed and demonstrated.

[1] T. Shoji,et al. Microphotonics devices based on silicon microfabrication technology , 2005, IEEE Journal of Selected Topics in Quantum Electronics.

[2] G. Reed. Device physics: The optical age of silicon , 2004, Nature.

[3] M. Lipson. Guiding, modulating, and emitting light on Silicon-challenges and opportunities , 2005, Journal of Lightwave Technology.

[4] Payne,et al. Nonlinear refractive index of optical crystals. , 1989, Physical review. B, Condensed matter.

[5] Qianfan Xu,et al. Experimental demonstration of guiding and confining light in nanometer-size low-refractive-index material. , 2004, Optics letters.

[6] A. Martinez,et al. Design of Silicon-Based Slot Waveguide Configurations for Optimum Nonlinear Performance , 2007, Journal of Lightwave Technology.