Field emission ultrahigh-resolution analytical electron microscope

Abstract This paper reports the present situation of the ultrahigh-resolution analytical electron microscope (UHRAEM) and the new technology introduced into the JEM-2010F. By adding an FEG to the TEM, not only does the image contrast greatly improve through its high coherency and low energy spread of electrons, but also sensitivity for nanometer area analysis improves substantially. Particularly, due to the probe current about 100 times larger than LaB6, it is possible to do high-sensitivity analysis with a sub-nanometer probe. With the UHRAEM, some of the difficulties in the new developments of materials science are being solved.