Photonic Crystal Vertical Cavity Surface Emitting and Detecting Photodiodes

A photonic crystal confined vertical‘cavity surface-emitting lasers was obtained under continuous operate at about 980nm wavelength·The experiments research’such as the spectrum analysis of GaAs materials，the oxidized processing and the photonic crystal fabrication，are detailed presented.A photonic crystal resonant cavity enhanced photodiode，which was based on the same materials of PC-VCSEL，was fabricated by wet·chemical etching and ICP etching techniques.