论文信息 - Effect of chemical surface treatment on p-layer formation in the interface region of directly bonded Si wafers - 字舞流文

Effect of chemical surface treatment on p-layer formation in the interface region of directly bonded Si wafers

I. Grekhov | E. Astrova | V. Voronkov | V. Kozlov | G. Kropotov | A. Lebedev | A. V. Patsekin