Thermal Barrier Phase Change Memory.

Phase change memory is widely considered as the most promising candidate as storage class memory (SCM), bridging the performance gaps between dynamic random access memory and flash. However, high required operation current remains the major limitation for the SCM application, even after using defect engineering materials, for example, Ti-doped Sb2Te3. Here, we demonstrate that ∼87% current can be reduced by spatially separating Sb2Te3 and TiTe2 layers, thanks to semimetallic TiTe2 serving as a thermal barrier in the reset process. Moreover, the stable crystalline TiTe2 layer provides an ordered interface to speed up the crystallization process of the amorphous Sb2Te3 layer, enabling ∼10 ns ultrafast crystallization speed. An outstanding device lifetime, up to ∼2 × 107 cycles, has been obtained, which is twice as long as that of alloy-based cells. Correlative electron microscopy and atom probe tomography provide evidence that the TiTe2/Sb2Te3 multilayer can keep a layer-stacked structure, avoiding phase segregation found in alloys and strong element intermixing in the GeTe/Sb2Te3 superlattice, which enables excellent cyclability. This study suggests that adding a semimetallic layer in the phase change layer, such as TiTe2 and TiSe2, can yield a phase change memory with superior properties.

[1]  A. Toffoli,et al.  Electrical Behavior of Phase-Change Memory Cells Based on GeTe , 2010, IEEE Electron Device Letters.

[2]  Greg Atwood,et al.  Phase-Change Materials for Electronic Memories , 2008, Science.

[3]  K. Gopalakrishnan,et al.  Phase change memory technology , 2010, 1001.1164.

[4]  Se-Ho Lee,et al.  SiO2 doped Ge2Sb2Te5 thin films with high thermal efficiency for applications in phase change random access memory , 2011, Nanotechnology.

[5]  G. Kresse,et al.  Ab initio molecular dynamics for liquid metals. , 1993 .

[6]  P Fons,et al.  Interfacial phase-change memory. , 2011, Nature nanotechnology.

[7]  J. J. Alvarado-Gil,et al.  Thermal and electrical properties of the Ge:Sb:Te system by photoacoustic and Hall measurements. , 1995, Physical review. B, Condensed matter.

[8]  Songlin Feng,et al.  One order of magnitude faster phase change at reduced power in Ti-Sb-Te , 2014, Nature Communications.

[9]  N. Yamada,et al.  Rapid‐phase transitions of GeTe‐Sb2Te3 pseudobinary amorphous thin films for an optical disk memory , 1991 .

[10]  D. Cahill,et al.  Lower limit to the lattice thermal conductivity of nanostructured Bi2Te3-based materials , 2009 .

[11]  C. Zhang,et al.  Study on impact fusion at particle interfaces and its effect on coating microstructure in cold spraying , 2007 .

[12]  Y. K. Kim,et al.  Changes in the electronic structures and optical band gap of Ge2Sb2Te5 and N-doped Ge2Sb2Te5 during phase transition , 2007 .

[13]  F. McTaggart,et al.  The sulphides, Selenides, and Tellurides of Titanium, Zirconium, Hafnium, and Thorium. I. Preparation and characterization , 1958 .

[14]  Richard Dronskowski,et al.  Unique Bond Breaking in Crystalline Phase Change Materials and the Quest for Metavalent Bonding , 2018, Advanced materials.

[15]  The micro-structure and composition evolution of Ti-Sb-Te alloy during reversible phase transition in phase change memory , 2014 .

[16]  H. Hng,et al.  Sb2Te3 Nanoparticles with Enhanced Seebeck Coefficient and Low Thermal Conductivity , 2010 .

[17]  H. Krause,et al.  Refinement of the Sb2Te3 and Sb2Te2Se structures and their relationship to nonstoichiometric Sb2Te3−ySey compounds , 1974 .

[18]  Zhitang Song,et al.  Ti-Sb-Te alloy: a candidate for fast and long-life phase-change memory. , 2015, ACS applied materials & interfaces.

[19]  Burke,et al.  Generalized Gradient Approximation Made Simple. , 1996, Physical review letters.

[20]  Blöchl,et al.  Projector augmented-wave method. , 1994, Physical review. B, Condensed matter.

[21]  B. Gault,et al.  Interfacial chemistry in an InAs/GaSb superlattice studied by pulsed laser atom probe tomography , 2012 .

[22]  Baptiste Gault,et al.  Atom Probe Microscopy , 2012 .

[23]  H.-S. Philip Wong,et al.  Phase Change Memory , 2010, Proceedings of the IEEE.

[24]  Min-Ping Zhu Ti-Sb-Te Phase Change Materials: Component Optimisation, Mechanism and Applications , 2017 .

[25]  Zhitang Song,et al.  Phase‐Change Memory Materials by Design: A Strain Engineering Approach , 2016, Advanced materials.

[26]  Songlin Feng,et al.  Direct observation of titanium-centered octahedra in titanium–antimony–tellurium phase-change material , 2015, Nature Communications.

[27]  Rajeev Ahuja,et al.  Structure of phase change materials for data storage. , 2006, Physical review letters.

[28]  Wei Zhang,et al.  In situ dynamic HR-TEM and EELS study on phase transitions of Ge2Sb2Te5 chalcogenides. , 2008, Ultramicroscopy.

[29]  J. F. Webb,et al.  One-dimensional heat conduction model for an electrical phase change random access memory device with an 8F2 memory cell (F=0.15 μm) , 2003 .

[30]  F. D. Salvo,et al.  Mechanisms for the 200 K transition in TiSe2: A measurement of the specific heat , 1978 .

[31]  Songlin Feng,et al.  Ti10Sb60Te30 for phase change memory with high-temperature data retention and rapid crystallization speed , 2012 .

[32]  Andre K. Geim,et al.  The rise of graphene. , 2007, Nature materials.

[33]  Paul S. Andry,et al.  Fabrication and characterization of robust through-silicon vias for silicon-carrier applications , 2008, IBM J. Res. Dev..

[34]  David J. H. Cockayne,et al.  Understanding atomic structures of amorphous C-doped Ge2Sb2Te5 phase-change memory materials , 2011 .

[35]  Marcel A. Verheijen,et al.  Interface formation of two- and three-dimensionally bonded materials in the case of GeTe-Sb₂Te₃ superlattices. , 2015, Nanoscale.