THE STATE OF THE ART OF MICROMACHINED GYROSCOPES

Along with the research and rapid development of Micro Electro-Mechanical Systems (MEMS), micromachined gyroscope as a part of MEMS driven by automobile industry has become a major focus of wide research and development in the past decades. Comparing with the conventional mechanical gyroscope, the solid-state gyroscope and optical gyroscope, the micromachined gyroscope has the advantages of low cost, small size, low weight and high reliability. With its performance improved further, the micromachined gyroscope can be applied in more extensive fields. In this paper, following a brief introduction of its definition, properties, performance indices, operation principles, classification and processes, various micromachined gyroscopes are discussed with respect to their structure, processes, operation principles and performance. Finally the current status of its commercialization and the trend of its developments in future are presented.