A High-$Q$ Millimeter-Wave Air-Lifted Cavity Resonator on Lossy Substrates

In this letter, a 3D high-quality-factor millimeter- wave cavity resonator is integrated on the lossy soda-lime glass substrate utilizing surface micromachining technologies. With a height of 300 mum, the air-lifted cavity features a measured Q of at least 219 at 30 GHz, demonstrating an improvement by almost an order of magnitude with respect to respective planar resonators on the same substrate. The 3D cavity is monolithically integrated on the top of the substrate, with its side walls consisting of two rows of metalized pillars, while a weak coupling excitation scheme is used to extract the quality factor. This high performance cavity can be easily integrated with other monolithic integrated circuits and planar mm-wave components in multilayer modules.

[1]  T. Itoh,et al.  A novel high-Q image guide resonator using band-gap structures , 1998, 1998 IEEE MTT-S International Microwave Symposium Digest (Cat. No.98CH36192).

[2]  L. Perregrini,et al.  Dispersion characteristics of substrate integrated rectangular waveguide , 2002, IEEE Microwave and Wireless Components Letters.

[3]  J. Papapolymerou,et al.  Low-loss LTCC cavity filters using system-on-package technology at 60 GHz , 2005, IEEE Transactions on Microwave Theory and Techniques.

[4]  W.J. Chappell,et al.  Precision fabrication techniques and analysis on high-Q evanescent-mode resonators and filters of different geometries , 2004, IEEE Transactions on Microwave Theory and Techniques.

[5]  Ke Wu,et al.  Accurate modeling, wave mechanisms, and design considerations of a substrate integrated waveguide , 2006, IEEE Transactions on Microwave Theory and Techniques.

[6]  L. Roy,et al.  High-Q LTCC resonators for millimeter wave applications , 2003, IEEE MTT-S International Microwave Symposium Digest, 2003.

[7]  R. Collin.  Foundations for microwave engineering , 1966 .

[8]  M.G. Allen,et al.  Polymer-core conductor approaches for RF MEMS , 2005, Journal of Microelectromechanical Systems.