论文信息 - A novel fiber-optic sensor used for small internal curved surface measurement

A novel fiber-optic sensor used for small internal curved surface measurement

A novel fiber-optic sensor used for small internal curved surface measurement is presented. A measurement principle based on beam reflection is described. Theoretically calculated curves and measured values are given. The results provide an essential theoretical and design basis for the measurement of curved surfaces with fiber-optic sensor. This sensor, which is composed of eight symmetrically cross-arranged receiving fibers and one centered emitting fiber, can accomplish distance measurement with high vertical resolution of 0.1 μm through compensation of the impacts caused by fluctuations of the surface reflectivity and light power.

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