Femtosecond Laser Ablation of ITO/ZnO for Thin Film Solar Cells☆

Abstract Femtosecond laser ablation of an Indium tin oxide/Zinc oxide (ITO/ZnO-Nanoparticles) multilayer coated on polyethylene terephthalate (PET) substrate has been investigated. Single pulse ablation thresholds were determined for front side and back side irradiation. The ablation behavior of ITO/ZnO on PET is studied and laser scribing using single- pass and multi-pass patterning is performed and analyzed regarding the usability to serial connect organic solar cells.