The Strucrure and Performance of Double-chamber Piezoelectric Pumps

The structure and working principle of the pumps consisted of two PZT actuators were introduced,and the output performance of the pumps with different structure and driving strategy was analyzed.Two piezoelectric pumps,serial-connected and parallel-connected,were fabricated. The double-chamber pumps were tested with both actuators being actuated in anti-phase,and then in-phase respectively.Heoretic analysis and testing results show that both serial and parallel double-chamber pumps achieve greater performance with the actuators working in anti-phase.The parallel-connected pump obtained the maximal flow-rate,which is about two times of that of a single chamber micropump.For the serial connection pump,its backup pressure is the greatest,which is about two times of that of single-chamber micropump,and its flow-rate is about 1.4 times of that of a single-chamber micropump.