论文信息 - Precision small angle measurements with a digital moiré technique

Precision small angle measurements with a digital moiré technique

A method to measure the rotation angle of structures is presented. The method is based on the projection digital moire technique, but instead of using a projection system we make use of the Talbot (self-imaging) phenomenon in order to produce the grating on the surface.

Roberto Torroba | R. Torroba | A. Tagliaferri | A. A. Tagliaferri

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