Development of MOEMS Devices and Their Reliability Issues

It is believed that MOEMS along with the development of MEMS are expected to have a major impact on our lives, much like the way that the integrated circuit has affected information technology. Some typical MOEMS devices were introduced in this chapter. Their structure and mechanisms were briefly discussed. Some of the failure mechanisms of the MOEMS were also discussed. It is believed that MOEMS failure mechanisms studies and the development of novel stiction, friction, wear, and residual stress reduction techniques will become critical for commercialization of MOEMS.

[1]  S. Arney Designing for MEMS Reliability , 2001 .

[2]  Kin F. Man,et al.  MEMS reliability for space applications by elimination of potential failure modes through testing and analysis , 1999, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[3]  D. M. Tanner,et al.  The effect of frequency on the lifetime of a surface micromachined microengine driving a load , 1998, 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173).

[4]  M. W. Miles A new reflective FPD technology using interferometric modulation , 1997 .

[5]  B. Bhushan,et al.  Bending and fatigue study on a nanoscale hinge by an atomic force microscope , 2004 .

[6]  Larry J. Hornbeck,et al.  Deformable-Mirror Spatial Light Modulators , 1990, Optics & Photonics.

[7]  B. Bhushan,et al.  Nanotribological characterization of digital micromirror devices using an atomic force microscope. , 2004, Ultramicroscopy.

[8]  S. Henck Lubrication of digital micromirrordevicesTM , 1997 .

[9]  Brian J. Gally P‐103: Wide‐Gamut Color Reflective Displays Using iMoD™ Interference Technology , 2004 .

[10]  D. M. Tanner,et al.  Vapor deposition of amino-functionalized self-assembled monolayers on MEMS , 2003, SPIE MOEMS-MEMS.

[11]  Kenneth A. Peterson,et al.  Linkage design effect on the reliability of surface-micromachined microengines driving a load , 1998, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[12]  Joseph J. Talghader Thermal management in optical MEMS , 2001, SPIE MOEMS-MEMS.

[13]  Yong-Kweon Kim,et al.  Preparation and characterization of perfluoro-organic thin films on aluminium , 1999 .

[14]  D. M. Tanner,et al.  The effect of humidity on the reliability of a surface micromachined microengine , 1999, 1999 IEEE International Reliability Physics Symposium Proceedings. 37th Annual (Cat. No.99CH36296).

[15]  S. Kayali,et al.  MEMS Reliability Assurance Activities at JPL , 2000 .

[16]  M. R. Douglass,et al.  Lifetime estimates and unique failure mechanisms of the Digital Micromirror Device (DMD) , 1998, 1998 IEEE International Reliability Physics Symposium Proceedings. 36th Annual (Cat. No.98CH36173).

[17]  Bharat Bhushan,et al.  Tribology Issues and Opportunities in MEMS , 1998 .

[18]  Robert G. Hunsperger,et al.  Integrated optics, theory and technology , 1982 .

[19]  Bharat Bhushan,et al.  Nanotribology And Nanomechanics- An Introduction , 2008 .

[20]  Bharat Bhushan,et al.  Characterization of nanomechanical and nanotribological properties of digital micromirror devices , 2004, Nanotechnology.

[21]  M. W. Miles 5.3: Digital Paper™: Reflective Displays Using Interferometric Modulation , 2000 .

[22]  B. Bhushan Macro- and Microtribology of MEMS Materials , 2000 .

[23]  Jin-Goo Park,et al.  Chemical, optical and tribological characterization of perfluoropolymer films as an anti-stiction layer in micro-mirror arrays , 2000 .

[24]  Larry J. Hornbeck,et al.  Digital Light Processing update: status and future applications , 1999, Electronic Imaging.

[25]  John Batey,et al.  Digital Paper™ for reflective displays , 2003 .

[26]  Michael R. Douglass,et al.  DMD reliability: a MEMS success story , 2003, SPIE MOEMS-MEMS.

[27]  B. Bhushan,et al.  Investigation of nanotribological and nanomechanical properties of the digital micromirror device by atomic force microscopy , 2004 .

[28]  W. M. Miller,et al.  Effect of W coating on microengine performance , 2000, 2000 IEEE International Reliability Physics Symposium Proceedings. 38th Annual (Cat. No.00CH37059).

[29]  T. Stolarski Modern Tribology Handbook , 2003 .

[30]  Larry J. Hornbeck,et al.  The DMD^TM Projection Display Chip: A MEMS-Based Technology , 2001 .

[31]  M. P. Boer,et al.  Tribology of MEMS , 2001 .