Modeling and Optimization of Cluster Tools in Semiconductor Manufacturing

[1]  Marvin S. Seppanen,et al.  Evaluation of cluster tool throughput for thin film head production , 1999, WSC '99.

[2]  Robert W. Atherton,et al.  Performance analysis of multi-process semiconductor manufacturing equipment , 1990, IEEE/SEMI Conference on Advanced Semiconductor Manufacturing Workshop.

[3]  F. G. Boebel,et al.  30% productivity increase of 16 Mb-DRAM gate-conductor etching without additional investment , 1996, IEEE/SEMI 1996 Advanced Semiconductor Manufacturing Conference and Workshop. Theme-Innovative Approaches to Growth in the Semiconductor Industry. ASMC 96 Proceedings.

[4]  Barbara Culhane.  Brooks Automation , 2005, WSC '05.

[5]  Babak Hamidzadeh,et al.  An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints , 2001, IEEE Trans. Robotics Autom..

[6]  Wlodzimierz M. Zuberek,et al.  Timed Petri nets in modeling and analysis of cluster tools , 2001, IEEE Trans. Robotics Autom..

[7]  Sarayuth Poolsup,et al.  Cluster tool simulation assists the system design , 2000, 2000 Winter Simulation Conference Proceedings (Cat. No.00CH37165).

[8]  J. D. Johannes,et al.  Systems Simulation: The Art and Science , 1975, IEEE Transactions on Systems, Man, and Cybernetics.

[9]  S. C. Wood,et al.  Simple performance models for integrated processing tools , 1996 .

[10]  Eugene Levner,et al.  Multiple-part cyclic hoist scheduling using a sieve method , 1999, IEEE Trans. Robotics Autom..

[11]  John H. Holland,et al.  Adaptation in Natural and Artificial Systems: An Introductory Analysis with Applications to Biology, Control, and Artificial Intelligence , 1992 .

[12]  R. A. Hendrickson.  Optimizing cluster tool throughput , 1997 .

[13]  S.C. Wood,et al.  Performance models of systems of multiple cluster tools , 1996, Nineteenth IEEE/CPMT International Electronics Manufacturing Technology Symposium.

[14]  Raghavan Srinivasan,et al.  Modeling and performance analysis of cluster tools using Petri nets , 1998 .

[15]  J. Galletly.  An Overview of Genetic Algorithms , 1992 .

[16]  John L. Mauer,et al.  The simulation of integrated tool performance in semiconductor manufacturing , 1993, WSC '93.

[17]  S. C. Wood,et al.  Systems of multiple cluster tools: configuration and performance under perfect reliability , 1998 .

[18]  Christopher D. Geiger,et al.  A Tabu search approach to scheduling an automated wet etch station , 1997 .

[19]  N. G. Pierce,et al.  Evaluating the throughput of cluster tools using event-graph simulations , 1994, Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC).

[20]  Krishna C. Saraswat,et al.  Modeling the performance of cluster-based fabs , 1991, 1991 Proceedings IEEE/SEMI International Semiconductor Manufacturing Science Symposium.

[21]  Niklaus Wirth,et al.  What can we do about the unnecessary diversity of notation for syntactic definitions? , 1977, Commun. ACM.

[22]  S. Rostami,et al.  Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints , 2002 .

[23]  Jeffrey W. Herrmann,et al.  Sequencing Wafer Handler Moves to Improve the Performance of Hybrid Cluster Tools , 2000 .

[24]  Tae-Eog Lee,et al.  Performance Modeling of Cluster Tools using Timed Petri Nets , 1999 .

[25]  Todd LeBaron,et al.  Using emulation to validate a cluster tool simulation model , 2000, 2000 Winter Simulation Conference Proceedings (Cat. No.00CH37165).

[26]  H. Jetter,et al.  Productivity improvement for dry etch equipment through the application of simulation , 2000, Proceedings of ISSM2000. Ninth International Symposium on Semiconductor Manufacturing (IEEE Cat. No.00CH37130).

[27]  Tae-Eog Lee,et al.  Modeling and Implementation of a Real-Time Embedded Scheduler for CVD Cluster Tools , 2000 .

[28]  Yves Crama,et al.  Robotic flowshop scheduling is strongly NP-complete , 1997 .

[29]  Wlodzimierz M. Zuberek,et al.  Petri net modeling and performance analysis of cluster tools with chamber revisiting , 2001, ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597).

[30]  S. C. Wood.  Cost and cycle time performance of fabs based on integrated single-wafer processing , 1997 .

[31]  R. S. Gyurcsik,et al.  Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput , 1996 .

[32]  Richard C. Holt,et al.  Some Deadlock Properties of Computer Systems , 1972, CSUR.

[33]  Naiqi Wu,et al.  Necessary and sufficient conditions for deadlock-free operation in flexible manufacturing systems using a colored Petri net model , 1999, IEEE Trans. Syst. Man Cybern. Part C.

[34]  Upendra Dave,et al.  Heuristic Scheduling Systems , 1993 .

[35]  Niranjan Chandrasekaran,et al.  Operational Models for Evaluating the Impact of Process Changes on Cluster Tool Performance , 2000 .

[36]  M. A. Dimmler.  Using simulation and genetic algorithms to improve cluster tool performance , 1999 .

[37]  Wlodzimierz M. Zuberek,et al.  Timed Petri net models of multi-robot cluster tools , 2001, 2001 IEEE International Conference on Systems, Man and Cybernetics. e-Systems and e-Man for Cybernetics in Cyberspace (Cat.No.01CH37236).

[38]  R. S. Gyurcsik,et al.  Single-wafer cluster tool performance: an analysis of throughput , 1994 .

[39]  Peter van Zant.  Microchip fabrication : a practical guide to semiconductor processing , 2004 .

[40]  Li-Chen Fu,et al.  Petri-net and GA-based approach to modeling, scheduling, and performance evaluation for wafer fabrication , 2000, IEEE Trans. Robotics Autom..

[41]  Doo Yong Lee,et al.  Scheduling cluster tools in wafer fabrication using candidate list and simulated annealing , 1998, J. Intell. Manuf..

[42]  David E. Goldberg,et al.  Genetic Algorithms in Search Optimization and Machine Learning , 1988 .

[43]  Todd LeBaron,et al.  The simulation of cluster tools: a new semiconductor manufacturing technology , 1994, Proceedings of Winter Simulation Conference.

[44]  S. Venkatesh,et al.  A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots , 1997 .

[45]  Takeshi Yamada,et al.  A genetic algorithm with multi-step crossover for job-shop scheduling problems , 1995 .

[46]  J.E. Rooda,et al.  Clustertool optimization through scheduling rules , 1999, 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314).

[47]  Joseph Y.-T. Leung,et al.  On Minimum Cost Recovery from System Deadlock , 1979, IEEE Transactions on Computers.

[48]  MengChu Zhou,et al.  Avoiding deadlock and reducing starvation and blocking in automated manufacturing systems , 2001, IEEE Trans. Robotics Autom..

[49]  Andrew T. Duchowski,et al.  An Automatic Approach to Deadlock Detection and Resolution in Discrete Simulation Systems , 1997, INFORMS J. Comput..

[50]  Marios M. Levantopoulos.  A New Class of Petri Nets for Modeling, Planning and Scheduling of Flexible, Manufacturing Systems , 1994 .

[52]  Arie Shoshani,et al.  System Deadlocks , 1971, CSUR.

[53]  Qingsu Wang,et al.  Weighted configuration matrix approach to cluster tool metrics , 1999, 1999 IEEE International Symposium on Semiconductor Manufacturing Conference Proceedings (Cat No.99CH36314).

[54]  John L. Mauer,et al.  Using simulation to analyze integrated tool performance in semiconductor manufacturing , 1994 .

[55]  Jeffrey W. Herrmann,et al.  Sequencing Wafer Handler Moves to Improve the Performance of Sequential Cluster Tools , 2000 .

[56]  S. C. Wood,et al.  A generic model for cluster tool throughput time and capacity , 1994, Proceedings of 1994 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop (ASMC).

[57]  Neal G. Pierce,et al.  Development of generic simulation models to evaluate wafer fabrication cluster tools , 1992, WSC '92.

[58]  C. Bierwirth,et al.  Genetic algorithm based scheduling in a dynamic manufacturing environment , 1995, Proceedings of 1995 IEEE International Conference on Evolutionary Computation.

[59]  Wlodzimierz M. Zuberek,et al.  Timed Petri net models of cluster tools , 2000, Smc 2000 conference proceedings. 2000 ieee international conference on systems, man and cybernetics. 'cybernetics evolving to systems, humans, organizations, and their complex interactions' (cat. no.0.