论文信息 - A comparative study of high temperature Aluminium post-implantation annealing in 6H and 4H-SiC, non-uniformity temperature effects - 字舞流文

A comparative study of high temperature Aluminium post-implantation annealing in 6H and 4H-SiC, non-uniformity temperature effects

D. Planson | J. Chante | M. Locatelli | L. Ottaviani | K. Isoird | R. Nipoti | M. Lazar | C. Raynaud | G. Cardinali | A. Poggi