论文信息 - High numerical-aperture microlens fabricated by focused ion beam milling

High numerical-aperture microlens fabricated by focused ion beam milling

The focusing objective lens is a key component in the optical pick-up head. In this paper, focused ion beam milling is used to fabricate a NA 0.65 microlens in the silicon nitride film suspended on a silicon substrate. The measured NA is 0.64 and the focused spot size is 0.64 μm.

Yi Chiu | Chien-Hsun Huang | Ying-Chien Hsu

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