Packaged MEMS tunable resonators

In this paper, basic resonators including MEMS variable capacitor types are presented. MEMS structures allow tuning of the cell center frequency and input-output coupling. To improve the tunable resonator quality factor, the circuit is packaged using bulk micromachining techniques. MEMS varactors are associated in a parallel configuration to improve their quality factor. At 27 GHz, a semi-lumped resonator with a quality factor of 130 has been fabricated. MEMS varactors are not decoupled from the resonator to improve the Q, as it is usually done with low-Q semiconductor diodes.

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