论文信息 - Intrinsic microcrystalline silicon (μc-Si:H) deposited by VHF-GD (very high frequency-glow discharge): a new material for photovoltaics and optoelectronics - 字舞流文

Intrinsic microcrystalline silicon (μc-Si:H) deposited by VHF-GD (very high frequency-glow discharge): a new material for photovoltaics and optoelectronics

M. Vaněček | N. Wyrsch | J. Meier | Arvind Shah | P. Torres | U. Kroll | E. Vallat-Sauvain | C. Hof | C. Droz | M. Goerlitzer