Robust Adaptive Motion Tracking Control of Piezoelectric Actuation Systems for Micro/Nano Manipulation

This paper presents a robust adaptive control methodology for piezoelectric actuation systems to track specified motion trajectories. This methodology is proposed to deal with the control problems of unknown or uncertain system parameters, nonlinearities including the hysteresis effect, and external disturbances in the piezoelectric actuation systems, without any form of feed-forward compensation. In this paper, a special class of positive definite functions is employed to formulate the control methodology such that the closed-loop system stability can be guaranteed. The control formulation as well as the stability analysis is detailed. Furthermore, an experimental investigation is also conducted. Implementation of the control methodology is practical as only a knowledge of the estimated system parameters is required. In the experimental study, a promising tracking ability in following a specified motion trajectory is demonstrated. With the capability of motion tracking under the aforementioned conditions, the robust adaptive control methodology is very attractive in realising high performance control applications in the field of micro/nano manipulation.