论文信息 - Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle - 字舞流文

Scanning Type Microprobe for Displacement Measurement Based on Standing Wave Detection Using an Optically Trapped Particle

Yasuhiro Takaya | Terutake Hayashi | Masaki Michihata

[1] Hans Nørgaard Hansen,et al. Dimensional micro and nano metrology , 2006 .

[2] Yasuhiro Takaya,et al. Measurement of axial and transverse trapping stiffness of optical tweezers in air using a radially polarized beam. , 2009, Applied optics.

[3] Hiroyuki Takeuchi,et al. Ultrahighly accurate 3D profilometer , 2005, SPIE/COS Photonics Asia.

[4] H Han Haitjema,et al. High-accuracy CMM metrology for micro systems , 2004 .

[5] G. Wang,et al. Force measurement on microspheres in an optical standing wave , 2008 .

[6] Takashi Miyoshi,et al. Vibrational Probing Technique for the Nano-CMM based on Optical Radiation Pressure Control , 2004 .

[7] S. Chu,et al. Observation of a single-beam gradient force optical trap for dielectric particles. , 1986, Optics letters.

[8] A Weckenmann,et al. MANUFACTURING METROLOGY - STATE OF THE ART AND PROSPECTS , 2007 .

[9] Yasuhiro Takaya,et al. Nano position sensing based on laser trapping technique for flat surfaces , 2008 .

[10] Takashi Miyoshi,et al. Development of The Nano-CMM Probe based on Laser Trapping Technology , 1999 .