论文信息 - Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source - 字舞流文

Numerical evaluation of a 13.5-nm high-brightness microplasma extreme ultraviolet source

A. Endo | A. Sunahara | T. Ejima | Weihua Jiang | G. O'sullivan | Bowen Li | P. Dunne | T. Higashiguchi | T. Miura | H. Hara | T. Dinh | Goki Arai