A 0.35µm 1.25V piezo-resistance digital ROIC for liquid dispensing MEMS

A CMOS digital ROIC is presented for multi-channel and differential piezo-resistive sensing, as part of the positioning system of a liquid dispensing MEMS. New very low-voltage and single-battery compatible circuit techniques are proposed for digital gain tuning, pre-amplification and A/D conversion. Also, overall low-power consumption is achieved by operating key devices in subthreshold to prevent from heating the fluidic MEMS. The complete system has been integrated in 0.35 mum CMOS 2-polySi 4-metal technology.

[1]  Liviu Nicu,et al.  A Closed-loop MEMS-based Spotter Integrating Position Sensors with Nanometric Precision for the Control of Droplet Uniformity , 2006, 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems.

[2]  Arindam Basu,et al.  A Charge-Based Low-Power High-SNR Capacitive Sensing Interface Circuit , 2008, IEEE Transactions on Circuits and Systems I: Regular Papers.

[3]  Bernabé Linares-Barranco,et al.  A Spatial Contrast Retina With On-Chip Calibration for Neuromorphic Spike-Based AER Vision Systems , 2007, IEEE Transactions on Circuits and Systems I: Regular Papers.

[4]  L. Carley,et al.  Electromechanical ΔΣ modulation with high-Q micromechanical accelerometers and pulse density modulated force feedback. , 2006 .

[5]  Tetsuya Asai,et al.  A subthreshold MOS neuron circuit based on the Volterra system , 2003, IEEE Trans. Neural Networks.

[6]  Jeffrey H. Lang,et al.  A six-phase multilevel inverter for MEMS electrostatic induction micromotors , 2004, IEEE Transactions on Circuits and Systems II: Express Briefs.

[7]  Piero Malcovati,et al.  CMOS-Based Monolithic Controllers for Smart Sensors Comprising Micromembranes and Microcantilevers , 2007, IEEE Transactions on Circuits and Systems I: Regular Papers.

[8]  Tobi Delbrück,et al.  A 128$\times$ 128 120 dB 15 $\mu$s Latency Asynchronous Temporal Contrast Vision Sensor , 2008, IEEE Journal of Solid-State Circuits.

[9]  J. S. Yuan,et al.  Low-power CMOS wireless MEMS motion sensor for physiological activity monitoring , 2005, IEEE Transactions on Circuits and Systems I: Regular Papers.

[10]  Gert Cauwenberghs,et al.  CMOS Camera With In-Pixel Temporal Change Detection and ADC , 2007, IEEE Journal of Solid-State Circuits.

[11]  Liviu Nicu,et al.  Liquid loading of silicon-based cantilevers using electrowetting actuation for microspotting applications , 2005 .

[12]  D.A. Hodges,et al.  All-MOS charge-redistribution analog-to-digital conversion techniques. II , 1975, IEEE Journal of Solid-State Circuits.

[13]  Gabor C. Temes,et al.  Circuit techniques for reducing the effects of op-amp imperfections: autozeroing, correlated double sampling, and chopper stabilization , 1996, Proc. IEEE.

[14]  Giacomo Indiveri,et al.  A VLSI array of low-power spiking neurons and bistable synapses with spike-timing dependent plasticity , 2006, IEEE Transactions on Neural Networks.

[15]  L. Richard Carley,et al.  Electromechanical /spl Delta//spl Sigma/ modulation with high-Q micromechanical accelerometers and pulse density modulated force feedback , 2006, IEEE Transactions on Circuits and Systems I: Regular Papers.

[16]  E. Vittoz,et al.  An analytical MOS transistor model valid in all regions of operation and dedicated to low-voltage and low-current applications , 1995 .

[17]  R. Howe,et al.  An integrated CMOS micromechanical resonator high-Q oscillator , 1999, IEEE J. Solid State Circuits.

[18]  Francisco Serra-Graells,et al.  Sub-1-V CMOS proportional-to-absolute temperature references , 2003, IEEE J. Solid State Circuits.