Ultra-Compact, Zero-Power Latching Linear Motor with Integrated Position Sensor for Portable Electronics

A large stroke, zero-power latching piezoelectrically actuated linear motor for portable electronics is designed, fabricated, and characterized. The actuator consists of a stator with a micromachined piezoelectric actuator and a metal guide with high permeability, and a permanent magnet rotor as well as an integrated position sensor. The completed actuator has a volume of 1 mm(w) times 3mm(t) times 5mm(l) with driving precision of 5 mum at a scalable full-stroke of 5 mum and a speed of 10 mm/s at 50 kHz of driving frequency. A built-in capacitive position sensor was able to determine the displacement of the rotor with a position sensitivity of 1 fF/mum.

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