Progress on development of Al2O3-SiO2 Ceramic MEMS-based monopropellant micropropulsion systemm

An Al2O3-SiO2 ceramic MEMS-based micropropulsion system was designed and fabricated using new fabrication route. The micropropulsion system consists of five major components: propellant reservoir, injector, electrodes, combustion chamber, and micronozzle; all integrated into a single volume of 20 mm × 20 mm × 5 mm. 85-15 wt% of HAN-water mixture was self-prepared and used as propellant along with electrolytic mechanism for ignition. Performance of the system was predicted numerically. The system was fabricated by microcasting the well-dispersed suspension of submicron Al2O3 powder and PSZ preceramic resin into a lithography-prepared PDMS soft mold and sintering at 1200°C to form the ceramic composite. Shrinkage of about 20% was noticed after sintering. TGA analysis reveals good thermal stability of the composite as weight loss at temperature of 1000°C is as small as 1.3wt%. SEM-EDX analysis verifies the formation of Al2O3-SiO2 composite as only elements of Al, O, and Si exist with a negligible amount of residual carbon. Current fabrication route hold the promise to fabricate MEMS micropropulsion system using different ceramic composite materials to meet different design requirements.

[1]  P. Greil.  Active‐Filler‐Controlled Pyrolysis of Preceramic Polymers , 1995 .

[2]  F. Aldinger,et al.  A silicoboron carbonitride ceramic stable to 2,000°C , 1996, Nature.

[3]  Kenneth S. Breuer,et al.  A performance evaluation of MEMS-based micronozzles , 1997 .

[4]  R. B. Cohen,et al.  Digital MicroPropulsion , 1999, Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291).

[5]  P. Greil,et al.  Electrical conductivity measurements as a microprobe for structure transitions in polysiloxane derived Si–O–C ceramics , 2000 .

[6]  Carole Rossi,et al.  Design, fabrication and modelling of MEMS-based microthrusters for space application , 2001 .

[7]  G. Whitesides,et al.  Fabrication of High Performance Ceramic Microstructures from a Polymeric Precursor Using Soft Lithography , 2001 .

[8]  S. Spearing,et al.  Microfabrication of a high pressure bipropellant rocket engine , 2001 .

[9]  F. Santoni,et al.  Micropropulsion experiment on UNISAT-2 , 2002, Proceedings, IEEE Aerospace Conference.

[10]  Eui-Hyeok Yang,et al.  AN OVERVIEW OF MEMS-BASED MICROPROPULSION DEVELOPMENTS AT JPL , 2003 .

[11]  G. Whitesides,et al.  Solvent compatibility of poly(dimethylsiloxane)-based microfluidic devices. , 2003, Analytical chemistry.

[12]  Keiichi Hori,et al.  DEVELOPMENT OF HAN-BASED LIQUID PROPELLANT THRUSTER , 2004 .

[13]  Kaili Zhang,et al.  Development of a low-temperature co-fired ceramic solid propellant microthruster , 2005 .

[14]  Simon S. Ang,et al.  A MEMS-based solid propellant microthruster with Au/Ti igniter , 2005 .

[15]  Sylvie Rossignol,et al.  Thermal and catalytic decomposition of HNF and HAN liquid ionic as propellants , 2006 .

[16]  Darren L. Hitt,et al.  Viscous Effects on Performance of Two-Dimensional Supersonic Linear Micronozzles , 2008 .

[17]  Development and characterization of ceramic micro chemical propulsion and combustion systems , 2008 .

[18]  J. Park,et al.  Characterization and fabrication of polyvinylsilazane glass microfluidic channels via soft lithographic technique , 2008 .

[19]  Richard A. Yetter,et al.  Decomposition and Ignition of HAN-Based Monopropellants by Electrolysis , 2009 .

[20]  R. Yetter,et al.  A novel electrolytic ignition monopropellant microthruster based on low temperature co-fired ceramic tape technology. , 2009, Lab on a chip.

[21]  Tony Yuan,et al.  Design and Fabrication of a MEMS-Based Milli-Newton Level Hydrazine Thruster , 2009 .

[22]  Paolo Colombo,et al.  Polymer‐Derived Ceramics: 40 Years of Research and Innovation in Advanced Ceramics , 2010 .

[23]  Sejin Kwon,et al.  Design, fabrication, and testing of MEMS solid propellant thruster array chip on glass wafer , 2010 .

[24]  Kean How Cheah,et al.  Performance improvement on MEMS micropropulsion system through a novel two-depth micronozzle design , 2011 .

[25]  Darren L. Hitt,et al.  Mems-Based Satellite Micropropulsion Via Catalyzed Hydrogen Peroxide Decomposition , 2013 .