Piezoelectric based resonant mass sensor using phase measurement
暂无分享,去创建一个
[1] G. Uma,et al. Design of Microcontroller Based Resonant Sensor with Piezoelectric Excitation and Detection , 2008 .
[2] M. Esashi,et al. Silicon resonant angular rate sensor using electromagnetic excitation and capacitive detection , 1995 .
[3] S. O. Reza Moheimani. Experimental verification of the corrected transfer function of a piezoelectric laminate beam , 2000, IEEE Trans. Control. Syst. Technol..
[4] A. Taroni,et al. Development and application of mass sensors based on flexural resonances in alumina beams , 1996, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control.
[5] G. Stemme. Resonant silicon sensors , 1991 .
[6] Isabelle Dufour,et al. Resonant microcantilever type chemical sensors: analytical modeling in view of optimization , 2003 .