论文信息 - High speed InGaP emitter HBTs fabricated with ECR dry etch technique - 字舞流文

High speed InGaP emitter HBTs fabricated with ECR dry etch technique

R. S. Brozovich | F. Ren | S. Pearton | C. Abernathy | J. Lothian | J. E. Spencer | L.W. Yang | B. Shu Mercer