Linear displacement sensor using a new CMOS double-hall device

Abstract A contactless linear displacement sensor for geotechnical purposes, using a new two-output CMOS Hall devise and a high-gradient permanent magnets actuating system, was experimentally tested. The two Hall voltages were taken from neighboring contact. Thus, the magnetosensitivities were equal and opposite in signs and the offsets were nearly equal. A drastic reduction of the residual offset and its temperature drift with more than two orders of magnitude in wide temperature range was achieved. The obtained transducer efficiency of each output was 61 V/AT and the lowest detectable magnetic induction was about 12 μT in a frequency range 1 ≤  f  ≤ 10 2  Hz. The actuating structure contained two barium ferrite permanent magnets directly connected with their repulsive poles. This resulted in doubling of the magnetic flux along to the connecting plane. The linear displacement instrument was with measuring interval 3.0 mm and the error reached no more than 0.3% in the range 10° ≤  T  ≤ 40 °C.

[1]  A. Ivanov,et al.  A novel parallel-field hall sensor with low offset and temperature drift based 2D integrated magnetometer , 2004 .

[2]  P.J.A. Munter A low-offset spinning-current hall plate , 1990 .

[3]  K. Klitzing,et al.  Hall effect under null current conditions , 1994 .

[4]  Sandra Bellekom,et al.  Influence of mechanical stress on the offset voltage of Hall devices operated with spinning current method , 1999 .

[5]  R. Grechishkin,et al.  Analysis of a linear position sensor with a Hall effect element , 1994 .

[6]  S. Lindenkreuz,et al.  Offset reduction in silicon Hall sensors , 2000 .

[7]  K. Klitzing,et al.  Temperature‐insensitive offset reduction in a Hall effect device , 1994 .

[8]  Chavdar S. Roumenin,et al.  Solid State Magnetic Sensors , 1994 .

[9]  R. Steiner,et al.  Double-Hall sensor with self-compensated offset , 1997, International Electron Devices Meeting. IEDM Technical Digest.

[10]  S. Boonsang,et al.  A new magnetic configuration for a small in-plane electromagnetic acoustic transducer applied to laser-ultrasound measurements: Modelling and validation , 2006 .

[11]  Y. Kano,et al.  Linear position detector with rod shape electromagnet , 1990 .

[12]  Henry Baltes,et al.  Offset reduction in Hall devices by continuous spinning current method , 1998 .

[13]  Ch.S. Roumenin,et al.  Parallel-field Hall microsensors: an overview , 1992 .

[14]  G. Lemarquand,et al.  New structures for linear displacement sensor with high magnetic field gradient , 1992, 1992. Digests of Intermag. International Magnetics Conference.

[15]  Y. Netzer A very linear noncontact displacement measurement with a hall-element magnetic sensor , 1981, Proceedings of the IEEE.

[16]  Physik und Anwendung galvanomagnetischer Bauelemente , 1969 .