고진공용 터보 분자 펌프의 자기베어링 시스템 설계 연구

An active magnetic bearing spindle system for TMP is designed and its some dynamic performances are investigated. The AMB system consists of four couples of magnets, five gap sensors with its amplifiers and a DSP controller. The dimensions of AMB elements are determined by magnetic circuit theory simulation and it own desired specifications. A decentralized direct feedback PID controller is utilized to control the dynamics of the magnetic bearings. The designed AMB spindle system is manufactured, and its dynamic characteristics such as its own stability and frequency response functions are investigated by simulation and verified by some experiments.