Abstract The triangulation method, conoscopic holography method, and interferometry method were analysed for the effective measurement of microburr geometry formed while microdrilling. A cylinder with a diameter of 0.5 mm was used to show that the conoscopic holography method is effective for measuring steep slope surfaces. A program for the three-dimensional display and analysis of measured burr was developed. Burrs formed on a curved surface were compensated and measured successfully using the basic surface compensation function. The maximum burr height, burr volume, average burr height, and average burr thickness were also calculated. The burr measurement system is composed of a laser sensor, an XY table, a controller, and the burr measurement program. Burrs formed from drilling 3 mm holes and microblanking were measured successfully. For microburrs less than 20 μm, a high-definition Conoprobe sensor equipped with a CMM precision table was used.