A Capacitively-Loaded Quasi-Planar Ka-Band Resonator

A quasi-planar 250-mum-thick Ka-band resonator is designed and fabricated using a planarized microfabrication process. An air-filled TE 101 cavity resonator is modified to include vertical posts for improved mechanical stability and a metallic capacitive loading puck to reduce the overall device footprint. This 7.5 mm by 7.5 mm footprint is roughly 15 % smaller than that of an unaltered cavity resonator at the same frequency. Numerical modeling accurately predicts the behavior of the resonator and can be used for the extraction of an equivalent circuit and a loss budget for the device. The demonstrated unloaded quality factor (Q) is 442 at 25.75 GHz

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