Characterization of crystalline quality of diamond films by Raman spectroscopy

We have measured Raman spectra of diamond films prepared by a hot‐filament method and found that diamond layers on Si substrates are under compressive strain. The degree of the strain is found to increase with increasing nondiamond component in the diamond films. It is shown that Raman spectroscopy is a powerful method to estimate the crystalline quality, especially the strain in the diamond films.

[1]  A. Ishitani,et al.  Resonant Raman scattering of diamondlike amorphous carbon films , 1988 .

[2]  A. Ishitani,et al.  Raman spectra of diamondlike amorphous carbon films , 1988 .

[3]  E. Anastassakis,et al.  Effect of uniaxial stress on the zone-center optical phonon of diamond , 1978 .

[4]  R. Nemanich,et al.  First- and second-order Raman scattering from finite-size crystals of graphite , 1979 .

[5]  S. Matsumoto,et al.  Diamond synthesis from gas phase in microwave plasma , 1983 .

[6]  Kobashi,et al.  Synthesis of diamonds by use of microwave plasma chemical-vapor deposition: Morphology and growth of diamond films. , 1988, Physical review. B, Condensed matter.

[7]  Alexei A. Maradudin,et al.  A lattice theory of morphic effects in crystals of the diamond structure , 1970 .

[8]  Manuel Cardona,et al.  Light Scattering in Solids VII , 1982 .

[9]  James E. Butler,et al.  Infrared detection of gaseous species during the filament‐assisted growth of diamond , 1988 .

[10]  A. K. Ramdas,et al.  Brillouin scattering in diamond , 1975 .

[11]  Dale E. Ibbotson,et al.  Diamond crystal growth by plasma chemical vapor deposition , 1988 .

[12]  Y. Hirose,et al.  Rapid Growth of Diamond Films by Arc Discharge Plasma CVD , 1988 .

[13]  Fred H. Pollak,et al.  Stress-Induced Shifts of First-Order Raman Frequencies of Diamond- and Zinc-Blende-Type Semiconductors , 1972 .

[14]  A. K. Ramdas,et al.  Raman Spectrum of Diamond , 1970 .

[15]  Kazuhiro Suzuki,et al.  Growth of Diamond Thin Films by dc Plasma Chemical Vapor Deposition and Characteristics of the Plasma , 1987 .