论文信息 - CVD-Growth of Low-Doped 6H SIC Epitaxial Films - 字舞流文

CVD-Growth of Low-Doped 6H SIC Epitaxial Films

A. Henry | E. Janzén | N. T. Son | R. Glass | O. Kordina | C. Hallin | A. Konstantinov | C. Hemmingsson | E. Janzén