论文信息 - Design and optimization of 2D electrostatic micro scanning mirrors

Design and optimization of 2D electrostatic micro scanning mirrors

is paper demonstrates a 2D (two-dimensional) electrostatic MEMS scanning mirror. This scanner rotates on both axis X and Y, giving a two degrees of freedom. Finite element analysis has shown that optical scanning angle on axis X is 5.0° at 120V and axis Y is 4.4°at 160V. The structure has been optimized to achieve good dynamic performance.

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