FABRICATION AND MEASUREMENTS OF A SILICON WOODPILE ACCELERATOR STRUCTURE

We present results for the fabrication of a silicon woodpile accelerator structure. The structure was designed to have an accelerating mode at 3.95 μm, with a high characteristic impedance and an accelerating gradient of 530 MeV/m. The fabrication process uses standard nanofabrication techniques in a layer-by-layer process to produce a three-dimensional photonic crystal with 400 nm features. Reflection spectroscopy measurements reveal a peak spanning from three to five microns, and are show good agreement with simulations.