Analytical use of ion-induced X-rays

Measuring the X-ray emission induced by energetic protons and alpha particles from accelerators has become a valuable tool for studying trace amounts of most elements, and is especially suited for small samples. Typical parameter ranges are ion energies of 0.1-10 MeV/u, concentrations down to 10-6-10-7 by weight, absolute amounts down to 10-9-10-12g, trace elements of Z>or=13. The technique is described, and is based on the use of solid state X-ray detectors. Use of heavy ions, microbeams and surface analysis are all considered. Advantages and limitations of the technique are discussed, and comparison is made with X-ray emission generated by photons and electrons. Fields of application are reviewed.

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