Primary ion fluence dependence in time-of-flight SIMS of a self-assembled monolayer of octadecylphosphonic acid molecules on mica discussion of static limit

By using a self-assembled monolayer of octadecylphosphonic acid molecules, CH3(CH2)17PO(OH)2, on mica as a model of the "soft" materials, such as self-assembled monolayers (SAMs) and multilayers in many biological sys- tems as well as artificially engineered molecular electronic systems, we have examined the effects of primary ion fluence on time-of-flight secondary ion mass spectrometry (TOF-SIMS) of the technologically important model. Our measurements clearly show that although the intensity per unit primary ion fluence of most atomic ions and many small fragment ions do not vary by more than 10% for the fluence range of 10 10 -10 13 cm -2 , the intensity of the parent molecular ion can drop by two orders of magnitude in this fluence range. While the changes are different for the pri- mary ion beams of Bi3 + (25 keV, 45°), Bi + (25 keV, 45°), and Ar + (8 keV, 45°), they are all substantial, with the dam- age cross section induced by the Bi3 + beam being the largest (6 000 A 2 ). Since different secondary ions have quite different intensity changes, the analytical results derived from TOF-SIMS can vary significantly by the time and dura- tion of the measurements in the TOF-SIMS experiment. Therefore, our results suggest that for TOF-SIMS of molecular layers such as SAMs, the primary ion fluence condition should be recorded and reported. In general, the validity of the