论文信息 - Assessing the Correlation Between Location and Size of Catastrophic Breakdown Events in High-K MIM Capacitors - 字舞流文

Assessing the Correlation Between Location and Size of Catastrophic Breakdown Events in High-K MIM Capacitors

P. Hurley | G. Reimbold | E. Miranda | J. Suñé | S. Monaghan | K. Cherkaoui | F. Campabadal | D. Blachier | J. Muñoz-Gorriz