Figure-errors as an optical manufacture error would degrade the performance of optical system. Optical components-clocking around optical axis is a classical method of figure-errors compensation. However, the compensation ability of optical component clocking is limited by the distribution of actual figure-error. This paper proposes a compensation-surface method, which is a simple and effective method for figure-error compensation. Based on the predicted wavefront error with actual figure error, an analytical computational method of figure function of the compensation-surface is built. The figure of compensation-surface is a deterministic polished surface. Finally the other figure errors can be largely compensated by the compensation-surface. The method is implemented on a manufactured optical system, a 193nm small-field projection lens. Simulation experiment proves our method can greatly reduce the aberration caused by figure errors. The WFE can be reduced to 0.04λ (λ=193.29nm) from 0.265λ and reduced by 84%. The compensation effect is more remarkable, and nearly 2.7 times the compensation effect of optical-component clocking method.
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