Deep-submicron HEMT technology

Abstract The current status of HEMT technology and its impact on computers and communications are presented, focusing on the advantages of the device in the deep-submicrometre dimensional range, self-aligned HEMT processing, and the HEMT LSI implemented in supercomputer and communication systems. Ultra-low-noise HEMTs are already commercially available in satellite communications, and have made a great impact in expanding the broadcasting satellite market. For ultra-high-speed digital LSI applications the 1 k gate bus-driver logic LSI has been developed to demonstrate high-speed data transfer in a high-speed parallel processing supercomputer system at room temperature, operating at 10·92 Gflops. The 7 k gate asynchronous transfer mode (ATM) switch LSI has alsi been developed to evaluate high-speed data switching for Broadband Integrated Service Digital Network (B-ISDN). The maximum operation frequency was 1·2 GHz at room temperature. The single-chip throughput was 9·6 Gb/s and a throughput of 38·4 Gb/s was achieved in a 4 × 4 ATM switching module.

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