Low-Noise Avalanche Photodiode in Standard 0.35-$\mu \hbox{m}$ CMOS Technology

In this paper, we report on an avalanche photodiode (APD) fabricated in a standard 0.35-mum CMOS technology. The main electrooptical characteristics of the device are presented, showing a remarkably low-noise factor if compared to other CMOS APDs. An estimation of the noise properties of a pixel based on the proposed photodiode with charge-amplifier readout is performed, showing that it could have an improved noise performance with respect to a standard photodiode-based pixel.

[1]  Bahaa E. A. Saleh,et al.  Effect of dead space on gain and noise in Si and GaAs avalanche photodiodes , 1992 .

[2]  Alexander I. Krymski,et al.  A 9-V/Lux-s 5000-frames/s 512/spl times/512 CMOS sensor , 2003 .

[3]  Suk Hwan Lim,et al.  A 10,000 Frames/s 0.18 μm CMOS Digital Pixel Sensor with Pixel-Level Memory , 2001 .

[4]  R. Mcintyre The distribution of gains in uniformly multiplying avalanche photodiodes: Theory , 1972 .

[5]  Radivoje Popovic,et al.  Dead space effect on the wavelength dependence of gain and noise in avalanche photodiodes , 2000 .

[6]  Alice Biber,et al.  Avalanche photodiode image sensor in standard BiCMOS technology , 2000 .

[8]  R. Popovic,et al.  Low-noise silicon avalanche photodiodes fabricated in conventional CMOS technologies , 2002 .

[9]  J. C. Jackson,et al.  Avalanche photodiode-based active pixel imager , 2004, IEEE Transactions on Electron Devices.

[10]  R. V. Overstraeten,et al.  Measurement of the ionization rates in diffused silicon p-n junctions , 1970 .

[11]  S. M. Sze,et al.  Physics of semiconductor devices , 1969 .

[12]  R. Mcintyre Multiplication noise in uniform avalanche diodes , 1966 .

[13]  Edoardo Charbon,et al.  A Single Photon Avalanche Diode Array Fabricated in Deep-Submicron CMOS Technology , 2006, Proceedings of the Design Automation & Test in Europe Conference.

[14]  Shoji Kawahito,et al.  CMOS active pixel image sensor with in-pixel CDS for high-speed cameras , 2005, International Congress on High-Speed Imaging and Photonics.

[15]  G. Patounakis,et al.  Active CMOS biochip for time-resolved fluorescence detection , 2005, Digest of Technical Papers. 2005 Symposium on VLSI Circuits, 2005..