X-ray refractive glass microlenses produced by ion beam lithography

We demonstrate the capabilities of ion-beam lithography (IBL) for the manufacturing of X-ray micro-optics from amorphous materials. The feasibility of rapid and direct milling of microlenses in glass using a Ga+ ion beam is presented in this work. A single lens with curvature radii below 3 μm was produced from microstructure- and artifacts-free materials: borosilicate glass. In addition, the use of IBL to create optics with a complex curved surface with a radius of curvature of less than 3 μm from single crystal silicon has been shown. The new generation of micro-optics from new materials will be in demand for coherent applications at modern diffraction-limited light sources.

[1]  B. Lengeler,et al.  A compound refractive lens for focusing high-energy X-rays , 1996, Nature.

[2]  A. Snigirev,et al.  High energy X-ray micro-optics , 2008 .

[3]  Anatoly Snigirev,et al.  Materials for x-ray refractive lenses minimizing wavefront distortions , 2017 .

[4]  W. Ludwig,et al.  Dark-field X-ray microscopy for multiscale structural characterization , 2015, Nature Communications.

[5]  A. Snigirev,et al.  Diamond refractive micro-lenses for full-field X-ray imaging and microscopy produced with ion beam lithography. , 2020, Optics express.

[6]  Anatoly Snigirev,et al.  Beryllium parabolic refractive x‐ray lenses , 2004 .

[7]  Anatoly Snigirev,et al.  X-ray high-resolution diffraction using refractive lenses , 2005 .

[8]  A. Snigirev,et al.  Optical performance and radiation stability of polymer X-ray refractive nano-lenses. , 2019, Journal of synchrotron radiation.

[9]  Anatoly Snigirev,et al.  High‐Resolution Transmission X‐ray Microscopy: A New Tool for Mesoscopic Materials , 2010, Advanced materials.

[10]  I. Snigireva,et al.  In situ hard X-ray transmission microscopy for material science , 2017, Journal of Materials Science.

[11]  Anatoly Snigirev,et al.  Fourier crystal diffractometry based on refractive optics , 2013 .

[12]  M. Di Michiel,et al.  Silicon planar lenses for high-energy x-ray nanofocusing , 2007, SPIE Optical Engineering + Applications.

[13]  Irina Snigireva,et al.  X-ray refractive planar lens with minimized absorption , 2000 .

[14]  Anatoly Snigirev,et al.  In situ hard X-ray microscopy of self-assembly in colloidal suspensions , 2013 .

[15]  Anatoly Snigirev,et al.  Microradian X-ray diffraction in colloidal photonic crystals , 2006 .

[16]  A. Snigirev,et al.  Polymer X-ray refractive nano-lenses fabricated by additive technology. , 2017, Optics express.