Hydrogen incorporation in epitaxial layers of 4H- and 6H-silicon carbide grown by vapor phase epitaxy
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M. Linnarsson | N. Nordell | R. Helbig | A. Schöner | K. Rottner | C. Peppermüller | C. Peppermüller
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M. Linnarsson | N. Nordell | R. Helbig | A. Schöner | K. Rottner | C. Peppermüller | C. Peppermüller