Monolithic 512x512 CMOS-Microbridge Arrays For Infrared Scene Projection

A mosaic array of resistively heated microbridges offers much flexibility for d y d c infrared scene simulations important for the testing of the real time performance capability of infrared (IR) cameras and seekers. This paper describes the application of microstructure technology to the fabrication of infrared scene projector arrays with resistively heated microemitters. The excellent thermal properties of the emitting pixels obtained with thin films and a unique the& isolation design makes it possible to achieve high (1000K) temperatures, high radiance dynamic range, and high speeds at power levels necessary for IR simulation requirements.