论文信息 - A 1.5μW 1V 2nd-Order ΔΣ Sensor Front-End with Signal Boosting and Offset Compensation for a Capacitive 3-Axis Micro-Accelerometer

A 1.5μW 1V 2nd-Order ΔΣ Sensor Front-End with Signal Boosting and Offset Compensation for a Capacitive 3-Axis Micro-Accelerometer

The paper presents a DeltaSigma sensor for a capacitive micro-accelemeter. The prototype was fabricated with a 0.25 mum CMOS technology with MIM capacitors. The silicon area of the front-end is 0.49 mm2. The chip was combined with an external plusmn2g capacitive 3-axis accelerometer on a PCB.This DeltaSigma sensor front-end IC draws 1.5 muA from a 1V supply while sampling three proof masses, each at 4.096 kS/s.

[1] Yukihiro Fujimoto,et al. A current-controlled latch sense amplifier and a static power-saving input buffer for low-power architecture , 1993 .

[2] Paul R. Gray,et al. A 10 b, 20 Msample/s, 35 mW pipeline A/D converter , 1995, IEEE J. Solid State Circuits.

[3] Kari Halonen,et al. A 62μA Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer , 2007, 2007 IEEE International Solid-State Circuits Conference. Digest of Technical Papers.

[4] Ramesh Harjani,et al. An integrated low-voltage class AB CMOS OTA , 1999 .

[5] Gabor C. Temes,et al. High-accuracy circuits for on-chip capacitance ratio testing or sensor readout , 1994 .

[6] H. Kawaguchi,et al. Managing subthreshold leakage in charge-based analog circuits with low-V/sub TH/ transistors by analog T- switch (AT-switch) and super cut-off CMOS (SCCMOS) , 2006, IEEE Journal of Solid-State Circuits.

[7] M. Steyaert,et al. A 0.8-V, 8-/spl mu/W, CMOS OTA with 50-dB gain and 1.2-MHz GBW in 18-pF load , 2003, ESSCIRC 2004 - 29th European Solid-State Circuits Conference (IEEE Cat. No.03EX705).